| Parameter |
Value |
| Model Name |
FPA-3000iW |
| Resolution |
< 800 nm |
| N.A. |
0.24 |
| Reduction Ratio |
1:2 |
| Image Field Size |
52 × 52 mm |
| Exposure Wavelength |
i-line |
| Reticle Size |
6 inch |
| Wafer Size |
6″ / 8″ |
| Manufacturing Date |
February 1998 |
We are selling stepper equipment.
If you are interested, please contact us +82-31-274-0091